Content of this page: GT2010 Multi-function Vacuum Tester Instruction Manual Experiment 1 vacuum and vacuum coating Experiment 2 observation of low-pressure discharge and measurement of volt-ampere curve Appendix I List of Film Preparation Methods Appendix = 2 \* ROMAN II Rotary Vane Vacuum Pump Instructions GT2010 Multi-function Vacuum Tester Instruction Manual I. Overview Electroless plating was first used to prepare a protective film on the surface of optical components. Subsequently, in 1817, Fraunhofe etched glass with concentrated sulfuric acid or nitric acid in Germany, and occasionally obtained an anti-reflection film for the first time. It was deposited by chemical wet separation before 1835. Silver mirror films are the first optical films to be made in the world. Later, people used various optical films in chemical solutions and vapors. In the 1950s, in addition to some applications of large window glass antireflection coatings, chemical solution coating The method is gradually replaced by vacuum coating. Vacuum evaporation and sputtering are two of the most important processes that have been able to produce optical films in the industry. They have been applied on a large scale and actually appeared in 1930. Oil diffusion pump --- mechanical pumping system. In the field of sputter coating, in 1842, Grove discovered the phenomenon of cathode sputtering in the laboratory. When he studied the cathode corrosion of the tube, he found that the cathode material migrated to the vacuum tube wall. However, it was really applied to the research. The sputtering equipment was first revealed in 1877. In the last 70 years, due to the limitations of experimental conditions, the approval of the sputtering mechanism has long been in a state of ambiguity, so before 1950, the technology of sputtering film characteristics. Most of the data were unreliable. In the mid-19th century, sputtering techniques were used in the film preparation process of chemically active materials, precious metal materials, dielectric materials and refractory metal materials. Magnetron splashes appeared after 1970. Laser technology, the commercialized magnetron sputtering equipment supplied around the world in 1975, greatly expanded the field of sputtering technology applications. In the 1980s, sputtering technology really entered the industrial mass production application from laboratory application technology. Field. Existing deposition processes such as two-pole sputtering, three-pole sputtering, reactive sputtering, magnetron sputtering and double ion sputtering. Vacuum coating technology is a novel new technology for material synthesis and processing. It is an important part of surface engineering technology. Vacuum coating technology uses physical and chemical means to coat a solid surface with a special coating. The surface has many excellent properties such as abrasion resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation resistance, electrical conductivity, magnetic permeability, insulation and decoration, which are superior to solid materials, to improve product quality, extend product life, save energy and obtain Significant technical economic benefits. Therefore, vacuum coating technology is regarded as one of the most promising important technologies, and has shown an attractive market prospect in the development of high-tech industrialization. This emerging vacuum coating technology has Applicable in various fields of the national economy, such as aviation, aerospace, electronics, information, machinery, petroleum, chemical, environmental protection, military and other fields. Second, the instrument introduction and scope of use 1. The composition of the instrument: The GT2010 multi-function vacuum tester consists of five parts: vacuum unit, bell jar, discharge tube, instrument and control circuit. 1) The vacuum unit is a two-stage vacuum pumping system consisting of a mechanical pump and an oil diffusion pump. The ultimate vacuum can reach 10-3 Torr. 2) The built-in evaporation electrode can complete the vacuum evaporation film deposition. After proper modification, it can also be used for the electrical property test of the film material under vacuum environment, such as: I-V characteristic test of semiconductor film material; 3) The discharge tube is used to complete the experiment of gas discharge phenomenon; 4) The instrument part includes vacuum measuring instrument, evaporation display and control instrument, discharge display and control instrument, etc. 5) The circuit part includes three parts: vacuum unit control, evaporation process control and discharge process control. 2. Experimental content: This instrument is an ideal instrument for experiments on vacuum phenomena in colleges and universities. It can complete experiments such as vacuum acquisition and measurement, vacuum evaporation coating, gas discharge and plasma. 3. Instrument features: Traditional vacuum experimental instruments are mostly composed of metal parts. Many major physical processes are invisible. Students can only understand the physical process through the instrument. The main part of the equipment is made of high-strength glass. The instrument structure is compact and reasonable, the operation is simple, and the physical process is intuitive. It is easy to arouse students' interest and improve their ability to experiment and connect theory with practice. Third, the instrument structure diagram and description Control panel section 1. Description of panel components: 1) Evaporation ammeter (0-200A) 2) Total power switch 3) Operation selector switch 4) Evaporation power switch 5) Evaporation current adjustment 6) Total power indicator 2. Description of the working status of the work selection switch: 1) The device does not work. 2) Mechanical pump: mechanical pump work simultaneously high vacuum solenoid valve A, B work 3) Pre-operation of the diffusion pump: At this time, the A and C valves work, and the B valve does not work. At the same time, the heating power supply starts to be turned on. 4) Diffusion pump work: At this time, A, C, D valves work, B valve does not work. High pressure panel Panel component description: 1) glow voltage display 2) Glow current display 3) High voltage power switch 4) Current range selection 5) Glow voltage regulation Vacuum system 1) Sample placement rack 7) Vacuum chamber thermocouple tube 13) Vacuum chamber floor 19) Vacuum bellows 25) Adjustable feet 2) Pre-melted baffle 8) Ionization regulation 14) Vacuum discharge tube 20) Discharge tube thermocouple tube 26) moving pulley 3) Evaporation electrode 9) High vacuum C valve 15) Discharge tube cover 21) Pipe thermocouple regulation 4) Vacuum chamber glass bell jar 10) Four-stage oil diffusion pump 16) Equipment rack 22) High vacuum A valve 5) O-ring seal 11) Diffusion pump heating electric furnace 17) Manual diaphragm valve 23) Mechanical pump outlet 6) High vacuum D valve 12) Pre-melted bezel adjustment knob 18) High vacuum B valve 24) Mechanical pump Fourth, the main configuration parameters of the instrument The GT2010 multi-function vacuum tester consists of five parts: vacuum unit, bell jar, discharge tube, instrument and control circuit. 1. Vacuum unit: 2XZ-4 rotary vane vacuum pump main technical indicators: 1) Operating voltage: AC220V/50 Hz 2) Pumping rate: 4L/S 3) Limit pressure: 6×10-1 Pa 4) Motor power: 0.55KW 5) Inner diameter of inlet: 25mm 6) Oil consumption: 0.8L 7) Noise: 75LwdB(A) 2, four-stage diffusion pump: 1) Model: Four-stage pump 2) Ultimate vacuum: 5～10-6Pa 3) Pumping speed: 130L/S 4) Heating power: 800W 5) Oil quantity: 0.13 L 6) With mechanical pump Model: 2ZX-4 Precautions when using: Use the funnel to input from the exhaust pipe when refueling. Please use the Sichuan-made Chenguang 275# diffusion pump silicone oil. The heating furnace of the pump can use 500W/220V (about 4 inches) and the optimal distance between the furnace and the bottom of the pump is about 5m/m-10m/m. Adding silicone oil 120-150ml When the pump is in use, do not cut off the water. If the water is suddenly cut off, the electric furnace should be turned off. The inlet and outlet of the cooling water must be tight to prevent the water from being peeled off when the water pressure is high. After the row is ready, the vacuum degree of the system such as the mechanical pump should be turned on first. When -1Pa, the electric furnace can be turned on and the cooling water can be turned on. After the end of use, the heat source should be cut off, and the pump can be stopped before the pump is cooled. In case the "working fluid" is oxidized. If the color of the "working fluid" (silicone oil) is changed (dark yellow to black), the silicone oil has deteriorated and needs to be replaced. The heating electric furnace should not be larger than 10 m/m at the bottom of the diffusion pump. If too much is applied, the asbestos board should be used to seal off the excess part. The electric furnace unit can adjust the temperature, and when the silicone oil is boiled, the temperature is adjusted to a constant temperature to keep the silicone oil boiling continuously. When using, the temperature of the electric furnace must be slow. The rapid heating will cause strong stress on the glass and shorten the service life of the diffusion pump. The glass diffusion pump is most suitable for: 24 hours continuous operation, but most units are not three-shift, so they have to switch every day. Since each electric furnace is heated once, the glass will generate a stress once, and the number of times is increased, and the stress is severe. Over time, the diffusion pump will naturally be scrapped and scrapped. GG-17 heat-resistant rapid change 240 ° C-250 ° C (with 250ml beaker sample) refers to the test without stress, the stress at the bottom of the diffusion pump increases, the heat-resistant rapid temperature decreases, and the service life is shortened. V. Technical parameters and characteristics 1. Working voltage: AC220V±5% 50Hz 2. Machine power: 3000W 3. Machine weight: about 200Kg 4, external dimensions (mm): vacuum system: length 655 × width 565 × height 1440 electrical control system: length 555 × width 565 × height 1440 5, vacuum chamber ultimate vacuum: 10 × 10-3 Torr 6, evaporation current adjustment range: 0 ~ 150A 7, discharge tube working voltage: 0 ~ 1500V 8, discharge tube current measurement range: 200μA ~ 2A Sixth, equipment installation and commissioning 1. Installation environment requirements 1) Power supply: AC220V, 50Hz, maximum power 3000W 2) Temperature, humidity, gas source and cooling water: equipment should be stable and normal 3) Installation room: clean indoor, air circulation, no dust. 4) Grounding wire: indoor with independent grounding wire <3Ω 2, the installation sequence 1) Confirm that the installation environment meets the equipment installation requirements 2) Check the equipment for good condition (check if damage is caused during transportation) 3) Check the four-stage oil glass diffusion pump, glass bell jar, glass door, gauge and ionization gauge, etc. 4) Install four-stage oil glass diffusion pump, vacuum gauge tube and vacuum system piping. 5) Assemble the motor cabinet with the vacuum cabinet, connect the electrical connection cable and the signal input line and power cable of the composite vacuum gauge. 6) Confirm that all electrical components are intact. 7) Install the vacuum chamber evaporation electrode and related components. 8) Clean the glass bell jar and blow it dry with a fan, install the O-ring seal and place the bell jar. 9) Install the 20A power socket to ensure reliable connection. Seven, equipment operation and precautions 1) Check that all parts of the equipment are in good condition and the connection is safe (pay attention to grounding). 2) Turn on the main power supply, turn on the main power switch, and confirm that the circuit is not faulty. 3) After confirming that the gas connection specification is intact, open the work selection switch to the mechanical pump and pump the evaporation chamber vacuum. 4) Turn on the composite vacuum gauge power switch to measure the air pressure in the evaporation chamber at this time. (The composite vacuum gauge switch should be placed in the V2 measurement file at this time). 5) Vacuuming for about 30 minutes to achieve the required vacuum of the background. The background vacuum of the measuring chamber is evaporated, and the vacuum is better than 3 Pa. Ensure that the mechanical pump piping is not faulty. 6) The work selection switch is pre-operated to the diffusion pump, and the vacuum in the pump is diffused. At this time, the heating power cannot be turned on, and the air pressure in the evaporation chamber is measured. (At this time, the composite vacuum gauge switch should be placed in the V1 measurement. At the same time, put the vacuum measurement switch in the pipeline file. Make sure that the diffusion pump pipeline is not faulty. 7) Vacuum for about 30 minutes to achieve the required vacuum of the background. Measure the vacuum between the pipeline and the diffusion pump, the vacuum is better than 3Pa to ensure that the mechanical pump pipeline is not faulty. Eight, equipment maintenance 1. Ensure the smooth flow of cooling water and ensure the normal operation of the circulating water system. 2. All electrical knobs and switch states must be confirmed in the "off" state before use. 3. Vacuum system maintenance: 1) Pay attention to the vacuum pump to change the oil; 2) Pay attention to the reaction chamber and pipeline cleaning; 3) Pay attention to the sealing surface cleaning; 4) Turn off the vacuum gauge power before stopping the vacuum system, and then perform other operations. 5) Empty the vacuum chamber after the experiment is over. 4. After the coating work is carried out 2 or 3 times, the bell cover and the coated indoor parts must be cleaned in time to avoid a large amount of vaporized substances entering the vacuum system and impairing the vacuum performance; 5. When the diffusion pump is working continuously, the bell should be evacuated after dropping the bell. When the valve reaches 6~7Pa, the valve is opened. It is absolutely not allowed to directly pump high vacuum to avoid oxidation of the diffusion pump oil. 6. After the preparation work, the high vacuum measurement should be cut off first, then the high valve should be closed, and then inflated to avoid damage to the ionization gauge and diffusion pump oil oxidation; 7. Sudden power failure in the middle, the high vacuum measurement should be cut off immediately, then the high valve should be closed, and the low valve should be pulled out to the II position. After the call, wait for the mechanical pump to work for 2 to 3 minutes, then resume normal operation; 8. If the vacuum is not normal, you can use the accessory (pipe cover) to cover the exhaust port on the bottom of the coating chamber. Try to check whether the vacuum performance of the bottom plate is normal, to narrow the suspicious points and find out the cause correctly. 9. When the bell jar is in a vacuum state, the bell jar must not be lifted, otherwise it will be damaged; 10. After the inflation is completed, the inflation valve should be closed immediately; 11. For the maintenance of vacuum components and instruments, refer to the manual.
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In 1935, a single-layer anti-reflection film was developed by vacuum evaporation. However, its first application was on the ophthalmic lens after 1945. In 1938, the United States and Europe developed a double-layer anti-reflection film, but by 1949 In the year of 1965, a broadband three-layer anti-reflection system was developed. In terms of reflective film, General Electric Company made the first aluminum-plated lamp in 1937. Germany made the first medical use in the same year. Anti-abrasive hard enamel film. In the filter, Germany 1939 test deposited metal-dielectric film Fabry---Perot interference filter. 
